فارسی English
Silicon and Carbon Nanostructures and their applications in Bio-electronics and Micro-electro-mechanical systems

دکتر مهاجرزاده،
دانشکدۀ مهندسی برق و کامپیوتر،
پردیس دانشکده های فنی، دانشگاه تهران



In this presentation, we report our recent progress in the formation of micro and nano-structures of silicon by means of a novel high aspect ratio deep etching. The realization of various structures such as arrays of nano-rods, three-dimensional structures and micro-needles is presented. Interferometric and nano-sphere lithography methods have been exploited to realize ordered or partially ordered arrays of silicon nano-pillars and nano-rods. The application of such nano-structures for the fabrication of field effect devices will be presented. High sensitivity field effect transistors for the detection of DNA species are described which use nano-grass on their gate region.
In addition to silicon-based nano and micro-devices, the use of carbon nanotube as an entrapment medium for cancer cell detection is described. In this line of research, we have observed an unusual mechanical interaction between human cells and arrays of carbon nanotubes. While healthy cells seem to be not interactive with carbon nanotubes, the cancerous cells show strong adhesion to such nano-structures. Based on our investigations, an anomalous phenomenon is observed where the entrapment fraction of higher metastatic cancer cells is significantly more than lower metastatic grades. In addition weaker interaction has been observed for silicon micro and nano-structures.
The present phenomenon can be used to realize single cell analysis (endoscopy) on a silicon-chip. An electrical impedance based interdigital sensor has been developed and the results will be presented. Apart from the achievements obtained in our research center, the challenges ahead of current nano- and bio-electronic device fabrication will be shortly discussed









بیستمین کنفرانس مهندسی برق ایران

ICEE 2012، تهران، ایران